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Pascal Scheiblin
Pascal Scheiblin
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Disciplines:
Applied sciences
Civil engineering
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Thesis:
Cinetiques et dommages associes a la gravure selective sio#2/si sous faisceau d'ions fluorocarbones; apport de l'ellipsometrie a la caracterisation des surfaces gravees
Directed Thesis:
Implantation, diffusion et activation des dopants dans le germanium